System and method for collecting and refining SF6 gas

Abstract of <strong>EP0885841</strong><br>SF6 gas collected from the inside of a gas insulated machine (1) during maintenance and inspection is refined

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Method for surface treatment of silicon based substrate

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cavities and channels for the evacuation of cooling water as represented in SF6 etch silicon 78 79 80 81 actuated valve without water cooling 82

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Method for manufacturing a semiconductor device having

An evacuation system 25 such as a cryopump is connected to the vacuum The etch-back is performed by flowing the etching gas, for example, SF6

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Further, an evacuation plate 10 is provided outside the focus ring 5, e.g., CF4, C3F8, SF6, S2F10, CHF3, CH2F2, C4F8 and the like

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Method for laser-assisted etching of III-V and II-VI

Excited SF6 Interaction with Silicon Surfaces" J.the associated equipment schematically shown in FIG calls for the evacuation of the laser cavity

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Processes and equipments for preparing f2-containing gases,

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Analysis Of Plume Dispersion And Particle Trajectories In

(EPP).It may help in decision making regarding the emergency evacuation ofIn the final set of experiments, SF6 gas was released with a rate of

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of capacitors - placing component in container, evacuating

After evacuation of the chamber a gas sample is extracted and fed to a for testing SF6 tightness of capacitors. Enables ivity of 1 in 10

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