CONSTITUTION: A decomposition gas disposal device 1 comprises a neutralizing tank 4 in which a neutralizer 16 for neutralizing SF6 gas is sealed, a
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2015210-Damage introduced in silicon during reactive‐ion etching (RIE) in SI6 gas containing 10 Vol % of H2, He, N2, O2, or Ar has been investigat
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to determine the relationship between ac breakdown voltage and time to breakdown (V-t characteristics) when conducting particles are present in SFgas
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The following topics were dealt with: distribution level switchgear; SF6 switchgear; vacuum switchgear; switchgear design; standardisation; switchgear applica
Abstract of <strong>EP0885841</strong><br>SF6 gas collected from the inside of a gas insulated machine (1) during maintenance and inspection is refined
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